Three Zone 1500C PECVD Tube Furnace (80 mm OD) with 4 Channel Gas Delivery & Oil-less Vacuum Sys

Classification:

Laboratory Heating Equipments

Brand Name:

OTF-1500X-80-II-4CV-PE

Model Number:

Protech

Place of Origin:

Henan, China

Model:

PECVD furnace

Max.temperature:

1500C

Working temperature:

1400C

Heating Zones:

200mm/each

Total length:

600mm

RF frequency:

13.56 MHz ±0.005% stability

Reflection Power:

Reflection Power

RF Output Port:

50 Ω, N-type, female

Noise:

<50 dB

Cooling:

air cooling